Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Fri Oct 18 14:18:19 PDT 2002




Balzers:   Dead cryo pump should be up by middle of the week 10/20/02
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    Silane Nitrogen bottle change on Monday the 21st should be
back up on Tuesday
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok





More information about the thinfilms mailing list