Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Tue Sep 10 09:15:31 PDT 2002




Balzers:
Gryphon:
Implanter:   Bad or broken switch on end station vacuum controller
Innotec:
Metalica:
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





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