Equipment Status

Jim Haydon jhaydon at snf.stanford.edu
Wed Sep 11 07:58:52 PDT 2002




Balzers:
Gryphon:    Gryphon down for PPC problem should be back up early
Thursday (9/12/02) afternoon.
Implanter:
Innotec:
Metalica:    Will be down for cryo regen this afternoon should be up by
this evening.
STS Dep:
wbgen- CTB:
wbgen-LHP:
wbgen-RHP:
wbMETAL:
wbNITRIDE:
wbNONMETAL:
wbDIFF:
wbSILICIDE:
wbGAASCL:
wbMISCRES:
wbOPTRES:
DI WATER:
NITROGEN:





More information about the thinfilms mailing list