From jhaydon at snf.stanford.edu Tue Apr 1 14:05:05 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 01 Apr 2003 14:05:05 -0800 Subject: Thinfilms morning report 4/01/03 Message-ID: <3E8A0D11.948CF4A8@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: no gold target should have one soon Metalica: down for regen should be up late tonight STS Dep: still having dep and refractive index problems with nitride. plan to change MFC Wed 4/02/03 in the after noon wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAAS: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Apr 3 16:34:11 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 03 Apr 2003 16:34:11 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E8CD303.1C6DE129@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: leak in O-ring should be fixed Friday morning if new O-ring fixes it wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Apr 3 16:38:14 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 03 Apr 2003 16:38:14 -0800 Subject: Thinfilms morning report 40/03/03 Message-ID: <3E8CD3F6.7A25B2EF@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: leak in O-ring should be back up Friday morning if new O-ring fixes it wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Apr 4 12:26:05 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 04 Apr 2003 12:26:05 -0800 Subject: Thinfilms morning report 4/04/03 Message-ID: <3E8DEA5D.F15EE8F7@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: still possible problem with nitride see Jeannie if you have questions concerning nitride wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Apr 7 13:00:16 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 07 Apr 2003 13:00:16 -0700 Subject: Thinfilms morning report 04/07/03 Message-ID: <3E91D8D0.1142F6BC@snf.stanford.edu> Balzers: The Blazers will be taken down some time this week for a week or so it has developed a leak water leak in the RF feadthough Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: New problems with the RF not currently available for use wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Apr 8 10:18:19 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 08 Apr 2003 10:18:19 -0700 Subject: Thinfilms morning report 04/08/03 Message-ID: <3E93045B.583456AB@snf.stanford.edu> Balzers: Blazers will be taken down some time this week to fix a water leak in the RF feed through an shield cleaning . It will be down for at least a week Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: The RF is working now. It seems to have a flakey switch when selecting between high and low frequencies. It probably will show up as a green RF on LED on the low frequency power supply. This light should be on only when it is being asked. wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Apr 10 16:00:33 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 10 Apr 2003 16:00:33 -0700 Subject: Thinfilms morning report 04/10/03 Message-ID: <3E95F791.FFED7240@snf.stanford.edu> Balzers: balzers will be down to fix leak in RF feed through probably about a week starting Monday 04/14/03 Gryphon: ok Implanter: ok Innotec: ok Metalica: Being regend should be back up by early Friday morning. 04/11/03 STS Dep: Silane bottle change will be down until Friday afternoon 04/11/03 wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Apr 14 09:25:14 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 14 Apr 2003 09:25:14 -0700 Subject: Thinfilms morning report 4/14/03 Message-ID: <3E9AE0EA.3206D6CD@snf.stanford.edu> Balzers: Balzers will be down for leak repair probably all week Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: waiting for test completion should be up later today wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Apr 17 14:20:14 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 17 Apr 2003 14:20:14 -0700 Subject: Thinfilms morning report 04/17/04 Message-ID: <3E9F1A8E.68354D27@snf.stanford.edu> Balzers: Down for water leak in RF feed through should be back up early next week Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: Still working on problems hopefully they will be resolved soon wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Apr 18 10:26:21 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 18 Apr 2003 10:26:21 -0700 Subject: Thinfilms morning report 04/18/04 Message-ID: <3EA0353D.F89A7A45@snf.stanford.edu> Balzers: down for leak repair on RF feed through and water system changes should be up middle part of next week Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok for oxide should be up for nitride later today wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Apr 21 09:24:34 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 21 Apr 2003 09:24:34 -0700 Subject: Thinfilms morning report 4/20/03 Message-ID: <3EA41B42.C4CD61C2@snf.stanford.edu> Balzers: down for leak repair and water system changes Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok to use but check new recipes wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Apr 23 15:07:46 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 23 Apr 2003 15:07:46 -0700 Subject: Thinfilms morning report 04/23/03 Message-ID: <3EA70EB2.63845B2F@snf.stanford.edu> Balzers: down for water system changes Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Apr 30 09:31:40 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Wed, 30 Apr 2003 09:31:40 -0700 Subject: Thin films morning report 4/30/03 Message-ID: <3EAFFA6C.114C6E33@snf.stanford.edu> Thinfilms morning report 4/30/03 Balzers: Should be up today Gryphon: ok Implanter: ok Innotec: ok Metalica: being regend should be back up around 11:00 pm today STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok