Thinfilms morning report 04/07/03
Jim Haydon
jhaydon at snf.stanford.edu
Mon Apr 7 13:00:16 PDT 2003
Balzers: The Blazers will be taken down some time this week for a
week or so it has developed a leak water leak in the RF feadthough
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: New problems with the RF not currently available for use
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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