Thinfilms morning report 04/10/03

Jim Haydon jhaydon at snf.stanford.edu
Thu Apr 10 16:00:33 PDT 2003




Balzers:    balzers will be down to fix leak in RF feed through probably
about a week starting Monday 04/14/03
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    Being regend should be back up by early Friday morning.
04/11/03
STS Dep:    Silane bottle change will be down until Friday afternoon
04/11/03
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok





More information about the thinfilms mailing list