Thinfilms morning report 04/10/03
Jim Haydon
jhaydon at snf.stanford.edu
Thu Apr 10 16:00:33 PDT 2003
Balzers: balzers will be down to fix leak in RF feed through probably
about a week starting Monday 04/14/03
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: Being regend should be back up by early Friday morning.
04/11/03
STS Dep: Silane bottle change will be down until Friday afternoon
04/11/03
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
More information about the thinfilms
mailing list