Thinfilms morning report 04/17/04
Jim Haydon
jhaydon at snf.stanford.edu
Thu Apr 17 14:20:14 PDT 2003
Balzers: Down for water leak in RF feed through should be back up
early next week
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: Still working on problems hopefully they will be resolved
soon
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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