Thinfilms morning report 04/18/04
Jim Haydon
jhaydon at snf.stanford.edu
Fri Apr 18 10:26:21 PDT 2003
Balzers: down for leak repair on RF feed through and water system
changes should be up middle part of next week
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: ok for oxide should be up for nitride later today
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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