Thinfilms morning report 04/18/04

Jim Haydon jhaydon at snf.stanford.edu
Fri Apr 18 10:26:21 PDT 2003




Balzers:    down for leak repair on RF feed through and water system
changes should be up middle part of next week
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    ok for oxide should be up for nitride later today
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok





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