From jhaydon at snf.stanford.edu Tue Feb 11 10:19:35 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 11 Feb 2003 10:19:35 -0800 Subject: Thinfilms morning report 3/11/03 Message-ID: <3E493EB7.8A8B8BA4@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: down for HF drain line repair should be back by early afternoon wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Feb 11 10:30:43 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 11 Feb 2003 10:30:43 -0800 Subject: Thinfilms morning report 02/11/03 Message-ID: <3E494153.3C1ED4A8@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: down for HF drain line repair should be up by early afternoon wbSILICIDE: ok wbGAASCL: down for Hf drain repair should be up by late morning wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Feb 12 07:41:48 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 12 Feb 2003 07:41:48 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E4A6B3C.F337D5F@snf.stanford.edu> Balzers: ok Gryphon: Possible problem with 100% aluminum taget Implanter: ok Innotec: ok Metalica: Needs to be regend STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Feb 12 17:19:00 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 12 Feb 2003 17:19:00 -0800 Subject: Thinfilms morning report 2/12/03 Message-ID: <3E4AF284.B915F811@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: regen completed ok to use when it is at temperature STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: Left hot pot controller not working correctly do not use wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Feb 18 10:10:11 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 18 Feb 2003 10:10:11 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E527702.1BE32C78@snf.stanford.edu> Balzers: ok Gryphon: possible flow switch problem I have ordered a replacement should have it this week. Ok to use but expect glitches Implanter: ok Innotec: ok Metalica: ok STS Dep: bottle leak check ok. Ok to use after testing. wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Feb 18 10:17:26 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 18 Feb 2003 10:17:26 -0800 Subject: Thinfilms morning report 2/18/03 Message-ID: <3E5278B6.C8882CB9@snf.stanford.edu> Balzers: ok Gryphon: water flow switch problem I have ordered a replacement should have it this week. Ok to use but expect glitches Implanter: ok Innotec: ok Metalica: ok STS Dep: bottle change leak check ok.Ok to use after testing wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Feb 19 10:45:17 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 19 Feb 2003 10:45:17 -0800 Subject: Thinfilms morning report 2/19/03 Message-ID: <3E53D0BD.C7FE7A09@snf.stanford.edu> Balzers: ok Gryphon: flakey water flow switch have ordered replacement should have it this week ok to use but expect glitches Implanter: ok Innotec: ok Metalica: ok STS Dep: should be up early afternoon wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Feb 19 16:18:04 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 19 Feb 2003 16:18:04 -0800 Subject: Thinfilms morning report 2/09/03 Message-ID: <3E541EBC.6D210DE3@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: shield replacement next Wednesday 2/26/03 will take most of the day Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Feb 20 08:22:08 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 20 Feb 2003 08:22:08 -0800 Subject: Thinfilms morning report 2/20/03 Message-ID: <3E5500B0.41587C21@snf.stanford.edu> Balzers: ok Gryphon: flakey water flow switch have, ordered replacement should have it next week ok to use but expect glitches Implanter: ok Innotec: shield change next Wednesday 2/26/03 will be down most of the day Metalica: regen today should be back up late this afternoon STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Feb 24 14:59:39 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 24 Feb 2003 14:59:39 -0800 Subject: Thinfilms morning report 2/24/03 Message-ID: <3E5AA3DB.E277761E@snf.stanford.edu> Balzers: ok Gryphon: down for flow switch replacement should be back up by Thursday Implanter: ok Innotec: shield change Wednesday Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok