From jhaydon at snf.stanford.edu Thu Jan 2 16:08:32 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 02 Jan 2003 16:08:32 -0800 Subject: Thinfilms morning report 1/02/03 Message-ID: <3E14D480.35138593@snf.stanford.edu> Balzers: down but should be up tomorrow morning Gryphon: down needs at least a fuse could have other problems could be up by tomorrow Implanter: air line leak will fix it first thing tomorrow Innotec: work in progress should be up by next Tuesday Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Jan 6 09:32:10 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 06 Jan 2003 09:32:10 -0800 Subject: Thinfilms morning report 1/6/03 Message-ID: <3E19BD9A.2EDC4A58@snf.stanford.edu> Balzers: ok Gryphon: bad leak in PMC probably a valve seal hope to have it fixed by Tuesday or sooner Implanter: ok Innotec: relocation still in progress should be up by Wed. Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Jan 7 08:57:34 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 07 Jan 2003 08:57:34 -0800 Subject: Thinfilms morning report 1/7/03 Message-ID: <3E1B06FE.56E824F5@snf.stanford.edu> Balzers: ok Gryphon: leak in PMC probably valve seal should be up be Wed Implanter: ok Innotec: If all goes well should be done by this afternoon and should be available Wed Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Jan 13 16:28:36 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 13 Jan 2003 16:28:36 -0800 Subject: Thinfilms morning report 1/13/03 Message-ID: <3E2359B4.FEAE1C44@snf.stanford.edu> Balzers: water problem Gryphon: probable intermittent vacuum controller problem can be used but it could shut down in mid process Implanter: ok Innotec: still having arcing problem Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Jan 14 16:43:46 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 14 Jan 2003 16:43:46 -0800 Subject: Thinfilms morning report 1/14/03 Message-ID: <3E24AEC2.9195BAE@snf.stanford.edu> Balzers: water problem Gryphon: ok to use but it has some intermittent problems with water flow and possible vacuum controller problems Implanter: ok Innotec: chiller not working hopefully it will be up by Thursday Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Jan 16 13:37:06 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 16 Jan 2003 13:37:06 -0800 Subject: Thinfilms morning report 1/16/03 Message-ID: <3E272602.820EC6ED@snf.stanford.edu> Balzers: water system problems Gryphon: ok to use but may have some vacuum controller problems and water flow glitches. It has not had any for almost 24 hr. Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Jan 17 11:41:51 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 17 Jan 2003 11:41:51 -0800 Subject: Thinfilms morning report 1/17/03 Message-ID: <3E285C7F.29F1660E@snf.stanford.edu> Balzers: water control problem Gryphon: ok to use but could still have vacuum fault or water flow fault Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Jan 21 09:54:34 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 21 Jan 2003 09:54:34 -0800 Subject: Thinfilms morning report 1/21/03 Message-ID: <3E2D895A.5D028A5@snf.stanford.edu> Balzers: water system problems Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue Jan 21 16:31:52 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 21 Jan 2003 16:31:52 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E2DE678.E84F92EE@snf.stanford.edu> Balzers: water system problems Gryphon: plan to change alum. and alum silicon targets Wednesday afternoon should be back up late afternoon Implanter: ok Innotec: ok Metalica: being regened should be up Wed. morning STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Jan 22 09:44:53 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 22 Jan 2003 09:44:53 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E2ED895.438AD0A2@snf.stanford.edu> Balzers: water system problems Gryphon: target change will not take place today has been moved to some time next week Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed Jan 22 12:59:10 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Wed, 22 Jan 2003 12:59:10 -0800 Subject: Thinfilms morning report 1/22/03 Message-ID: <3E2F061E.42BF63D8@snf.stanford.edu> Balzers: water system problem Gryphon: target change will not be done today it has been moved to next week Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Jan 23 17:08:04 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 23 Jan 2003 17:08:04 -0800 Subject: Thinfilms morning report 1/23/03 Message-ID: <3E3091F4.36B5119F@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Jan 24 10:28:40 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 24 Jan 2003 10:28:40 -0800 Subject: Thinfilms morning report 1/24/03 Message-ID: <3E3185D8.438C763C@snf.stanford.edu> Balzers: water system problems Gryphon: ok Implanter: down for diffusion pump oil change and cryo compressor recharge on monday 1/27/03 Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon Jan 27 09:28:32 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Mon, 27 Jan 2003 09:28:32 -0800 Subject: Thinfilms morning report 1/27/03 Message-ID: <3E356C40.5B68CE4E@snf.stanford.edu> Balzers: ok Gryphon: ok Implanter: poor vaccum problem hope to get it solved today Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: leak in regulator in finger wall 12 should be fixed today dose not affect any equipment NITROGEN: ok From jhaydon at snf.stanford.edu Tue Jan 28 16:15:57 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Tue, 28 Jan 2003 16:15:57 -0800 Subject: Thinfilms morning report 128/03 Message-ID: <3E371D3D.74FF3650@snf.stanford.edu> Balzers: water control problem Gryphon: ok Implanter: poor vacuum should be back up by late Wed after noon Innotec: ok Metalica: being regend should be up mid Wed morning STS Dep: dead heater element in burn box should be up hopefully by Friday wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Jan 30 11:00:02 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 30 Jan 2003 11:00:02 -0800 Subject: Thinfilms morning report 1/30/03 Message-ID: <3E397632.D96A46B6@snf.stanford.edu> Balzers: water system problems Gryphon: ok Implanter: cleaned DP should be back up around noon Innotec: ok Metalica: ok STS Dep: waiting for heater element for burn box possibly today wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu Jan 30 14:17:35 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Thu, 30 Jan 2003 14:17:35 -0800 Subject: Thinfilms morning report 1/30/03 Message-ID: <3E39A47F.A731132B@snf.stanford.edu> Balzers: water system problem Gryphon: ok Implanter: vacuum problem fixed, usable after test Innotec: ok Metalica: ok STS Dep: looks like early part of next week before sts will be up wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Jan 31 10:39:09 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 31 Jan 2003 10:39:09 -0800 Subject: Thinfilms morning report 10/23/02 Message-ID: <3E3AC2CD.484302B4@snf.stanford.edu> Balzers: water system problems Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: waiting for heater element for burnbox hopefully early part of next week wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri Jan 31 10:40:38 2003 From: jhaydon at snf.stanford.edu (Jim Haydon) Date: Fri, 31 Jan 2003 10:40:38 -0800 Subject: Thinfilms morning report 1/31/03 Message-ID: <3E3AC326.DAC9A0DC@snf.stanford.edu> Balzers: water system problems Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: waiting for heater element for burn box hopefully early part of next week wbSOLVENT: ok wbgen- CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIFF: ok wbSILICIDE: ok wbGAASCL: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok