Thinfilms morning report 1/13/03
Jim Haydon
jhaydon at snf.stanford.edu
Mon Jan 13 16:28:36 PST 2003
Balzers: water problem
Gryphon: probable intermittent vacuum controller problem can be used
but it could shut down in mid process
Implanter: ok
Innotec: still having arcing problem
Metalica: ok
STS Dep: ok
wbSOLVENT: ok
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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