Thinfilms morning report 1/14/03
Jim Haydon
jhaydon at snf.stanford.edu
Tue Jan 14 16:43:46 PST 2003
Balzers: water problem
Gryphon: ok to use but it has some intermittent problems with water
flow and possible vacuum controller problems
Implanter: ok
Innotec: chiller not working hopefully it will be up by Thursday
Metalica: ok
STS Dep: ok
wbSOLVENT: ok
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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