Thinfilms morning report 1/16/03
Jim Haydon
jhaydon at snf.stanford.edu
Thu Jan 16 13:37:06 PST 2003
Balzers: water system problems
Gryphon: ok to use but may have some vacuum controller problems and
water flow glitches. It has not had any for almost 24 hr.
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: ok
wbSOLVENT: ok
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAASCL: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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