Thinfilms morning report 1/16/03

Jim Haydon jhaydon at snf.stanford.edu
Thu Jan 16 13:37:06 PST 2003




Balzers:    water system problems
Gryphon:    ok to use but may have some vacuum controller problems and
water flow glitches. It has not had any for almost 24 hr.
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    ok
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok





More information about the thinfilms mailing list