Thinfilms morning report 1/17/03

Jim Haydon jhaydon at snf.stanford.edu
Fri Jan 17 11:41:51 PST 2003




Balzers:    water control problem
Gryphon:    ok to use but could still have vacuum fault or water flow
fault
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    ok
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok





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