Thinfilms morning report 7/29/03
james haydon
jhaydon at snf.stanford.edu
Tue Jul 29 11:04:29 PDT 2003
Thinfilms morning report 7/29/03
Balzers: ok
Gryphon: problem with ion etch ok to use if you do not need this
function
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: ok
wbSOLVENT: ok
wbgen-CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIF: ok
wbSILICIDE: ok
wbGAAS-LHP: ok
wbGAAS-RHP: ok
wbMISCRES: ok
wbOPTRES: ok
CPD: ok
DI WATER: ok
NITROGEN: ok
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