Thinfilms morning report 6/10/03

james haydon jhaydon at snf.stanford.edu
Tue Jun 10 15:24:58 PDT 2003


Thinfilms morning report  6/10/03



Balzers: Water leak should be up by noonish tomorrow 6/11/03
Gryphon: ok
Implanter: ok
Innotec: Bad contactor on the chamber lift mechanism should be back up
by 6/12/03
Metalica: ok. High vacuum valve is much easier to use now
STS Dep: May have problems with low frequency oxide index of refraction
check your process
wbSOLVENT: ok
wbgen-CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIF: ok
wbSILICIDE: ok
wbGAAS-LHP: ok
wbGAAS-RHP: ok
wbMISCRES: ok
wbOPTRES: ok
CPD:  ok New piece of equipment
DI WATER: ok
NITROGEN: ok





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