Thinfilms morning report 6/13/03
james haydon
jhaydon at snf.stanford.edu
Fri Jun 13 11:12:13 PDT 2003
Thinfilms morning report 6/13/03
Balzers: ok
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: ok. High vacuum valve is much easier to use now
STS Dep: May have problems with low frequency oxide index of refraction
check your process
wbSOLVENT: ok
wbgen-CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIF: ok
wbSILICIDE: ok
wbGAAS-LHP: ok
wbGAAS-RHP: ok
wbMISCRES: ok
wbOPTRES: ok
CPD: ok New piece of equipment
DI WATER: ok
NITROGEN: ok
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