From jhaydon at snf.stanford.edu  Fri Mar 14 10:48:41 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 14 Mar 2003 10:48:41 -0800
Subject: Thinfilms morning report 03/14/03
Message-ID: <3E722409.4514D05F@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    problems with nitride should not use until fixed, ok to to
do oxide
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Mon Mar 17 12:31:13 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 17 Mar 2003 12:31:13 -0800
Subject: Thinfilms morning report 03/17/03
Message-ID: <3E763091.7CF39BB5@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    there may be some problems with the nitride system
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Tue Mar 18 16:25:41 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Tue, 18 Mar 2003 16:25:41 -0800
Subject: Thinfilms morning report 03/18/03
Message-ID: <3E77B905.310A5108@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    still have problems with the refractive index on nitride and
dep rate on nitride
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Wed Mar 19 16:13:46 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Wed, 19 Mar 2003 16:13:46 -0800
Subject: Thinfilms morning report 10/23/02
Message-ID: <3E7907BA.75BAFFA3@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    problem still with refractive index on nitride also low dep
rate on nitride and oxide
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Thu Mar 20 14:00:52 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Thu, 20 Mar 2003 14:00:52 -0800
Subject: Thinfilms morning report 10/23/02
Message-ID: <3E7A3A14.774E15D2@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    problem still with nitride index of refraction, dep rate on
nitride and oxide a little low
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAAS:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Mon Mar 24 09:36:14 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Mon, 24 Mar 2003 09:36:14 -0800
Subject: Thinfilms morning report 10/23/02
Message-ID: <3E7F420E.AE345399@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    still working on index of refraction for nitride and dep
rates for nitride and oxide
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Thu Mar 27 08:50:03 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Thu, 27 Mar 2003 08:50:03 -0800
Subject: Thinfilms morning report 10/23/02
Message-ID: <3E832BBB.3E2205B2@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     planetary is working
Metalica:    ok
STS Dep:    still working on possible nitride reflective index problem
wbSOLVENT:     ok
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Fri Mar 28 09:34:37 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 28 Mar 2003 09:34:37 -0800
Subject: Thinfilms morning report 10/23/02
Message-ID: <3E8487AD.9657D992@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:    still looking into problem with dep rate and refractive
index for nitride
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok




From jhaydon at snf.stanford.edu  Fri Mar 28 09:53:55 2003
From: jhaydon at snf.stanford.edu (Jim Haydon)
Date: Fri, 28 Mar 2003 09:53:55 -0800
Subject: Thinfilms morning report 3/28/032
Message-ID: <3E848C33.EB714D24@snf.stanford.edu>




Balzers:    ok
Gryphon:    ok
Implanter:    ok
Innotec:     ok
Metalica:    ok
STS Dep:   still looking into possible problem with dep rate and index
refraction for nitride
wbgen- CTB:    ok
wbgen-LHP:    ok
wbgen-RHP:    ok
wbMETAL:    ok
wbNITRIDE:    ok
wbNONMETAL:    ok
wbDIFF:    ok
wbSILICIDE:    ok
wbGAASCL:    ok
wbMISCRES:    ok
wbOPTRES:    ok
DI WATER:    ok
NITROGEN:    ok