Thinfilms morning report 10/23/02
Jim Haydon
jhaydon at snf.stanford.edu
Thu Mar 20 14:00:52 PST 2003
Balzers: ok
Gryphon: ok
Implanter: ok
Innotec: ok
Metalica: ok
STS Dep: problem still with nitride index of refraction, dep rate on
nitride and oxide a little low
wbSOLVENT: ok
wbgen- CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: ok
wbDIFF: ok
wbSILICIDE: ok
wbGAAS: ok
wbMISCRES: ok
wbOPTRES: ok
DI WATER: ok
NITROGEN: ok
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