From jhaydon at snf.stanford.edu Thu May 1 14:15:50 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 01 May 2003 14:15:50 -0700 Subject: thinfilms morning report 05/01/03 Message-ID: <3EB18E86.AC7348B4@snf.stanford.edu> Thinfilms morning report 5/1/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri May 2 08:18:17 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Fri, 02 May 2003 08:18:17 -0700 Subject: Thinfilms morning report 5/02/03 Message-ID: <3EB28C39.84ADBF63@snf.stanford.edu> Thinfilms morning report 5/2/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu May 8 12:27:43 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 08 May 2003 12:27:43 -0700 Subject: thinfilms morning report 5/08/03 Message-ID: <3EBAAFAF.469651F4@snf.stanford.edu> Thinfilms morning report 5/8/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN:ok From jhaydon at snf.stanford.edu Fri May 9 09:58:03 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Fri, 09 May 2003 09:58:03 -0700 Subject: thinfilms morning report 5/09/03 Message-ID: <3EBBDE1B.23F9AA1@snf.stanford.edu> Thinfilms morning report 5/9/03 Balzers: Water leak repaired but should sit over night before testing and using. Both inlet and return water line valves are closed. Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon May 12 08:33:14 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Mon, 12 May 2003 08:33:14 -0700 Subject: Thinfilms morning report 5/12/03 Message-ID: <3EBFBEBA.F2A72DBA@snf.stanford.edu> Thinfilms morning report 5/12/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed May 14 08:11:46 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Wed, 14 May 2003 08:11:46 -0700 Subject: thinfilms morning report 5/14/03 Message-ID: <3EC25CB2.6CC8EA0C@snf.stanford.edu> Thinfilms morning report 5/14/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu May 15 08:14:24 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 15 May 2003 08:14:24 -0700 Subject: Thinfilms morning report 5/15/03 Message-ID: <3EC3AED0.23C2B732@snf.stanford.edu> Thinfilms morning report 5/15/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu May 15 09:06:42 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 15 May 2003 09:06:42 -0700 Subject: Thinfilms morning report 5/15/03 Message-ID: <3EC3BB12.1A9329A7@snf.stanford.edu> Thinfilms morning report 5/15/03 Balzers: Down for work on power supplies should be back up mid afternoon. Gryphon: Plan to change the aluminum and aluminum silicon targets on 5/20/03 Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri May 16 07:46:31 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Fri, 16 May 2003 07:46:31 -0700 Subject: Thinfilms morning report 5/16/03 Message-ID: <3EC4F9C7.91EC0905@snf.stanford.edu> Thinfilms morning report 5/16/03 Balzers: ok Gryphon: Plan to change the aluminum and aluminum silicon targets on 5/20/03 Implanter: ok Innotec: ok Metalica ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Mon May 19 10:48:11 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Mon, 19 May 2003 10:48:11 -0700 Subject: Thinfilms morning report 5/19/03 Message-ID: <3EC918DA.2A3845ED@snf.stanford.edu> Thinfilms morning report 5/19/03 Balzers: ok Gryphon: Plan to change the aluminum and aluminum silicon targets on 5/20/03 Implanter: ok Innotec: ok Metalica: Down for regen should be back up mid to late after noon STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: Contamination problem should be back up late morning wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Tue May 20 08:14:31 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Tue, 20 May 2003 08:14:31 -0700 Subject: Thinfilms morning report 5/20/03 Message-ID: <3ECA4657.E4580725@snf.stanford.edu> Thinfilms morning report 5/20/03 Balzers: ok Gryphon: Plan to change the aluminum and aluminum silicon targets on 5/20/03 Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu May 22 16:33:26 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 22 May 2003 16:33:26 -0700 Subject: Thinfilms morning report 5/22/03 Message-ID: <3ECD5E46.51E9328@snf.stanford.edu> Thinfilms morning report 5/22/03 Balzers: ok Gryphon: Gryphon ok to use Implanter: ok Innotec: ok Metalica: ok STS Dep: ok wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri May 23 10:14:54 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Fri, 23 May 2003 10:14:54 -0700 Subject: Thinfilms morning report 5/23/03 Message-ID: <3ECE570E.F1F0E086@snf.stanford.edu> Thinfilms morning report 5/23/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: Down for regen should be up mid to later afternoon STS Dep: May have problems with low frequency oxide index of refraction check your process wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok CPD: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Wed May 28 08:13:19 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Wed, 28 May 2003 08:13:19 -0700 Subject: thinfilms morning report 5/28/03 Message-ID: <3ED4D20F.97F0A9B9@snf.stanford.edu> Thinfilms morning report 5/28/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: May have problems with low frequency oxide index of refraction check your process wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok CPD: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Thu May 29 10:58:38 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Thu, 29 May 2003 10:58:38 -0700 Subject: Thinfilms morning report 5/29/03 Message-ID: <3ED64A4E.680F0472@snf.stanford.edu> Thinfilms morning report 5/29/03 Balzers: ok Gryphon: ok Implanter: bottle change tomorrow will be back up Monday 6/02/03 Innotec: ok Metalica: Broken wafer preventing HV valve from closing all the way. It should be back up late afternoon STS Dep: May have problems with low frequency oxide index of refraction check your process wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok CPD: ok DI WATER: ok NITROGEN: ok From jhaydon at snf.stanford.edu Fri May 30 08:46:40 2003 From: jhaydon at snf.stanford.edu (james haydon) Date: Fri, 30 May 2003 08:46:40 -0700 Subject: Thinfilms morning report 5/30/03 Message-ID: <3ED77CE0.FAC79FD5@snf.stanford.edu> Thinfilms morning report 5/30/03 Balzers: ok Gryphon: ok Implanter: ok Innotec: ok Metalica: ok STS Dep: May have problems with low frequency oxide index of refraction check your process wbSOLVENT: ok wbgen-CTB: ok wbgen-LHP: ok wbgen-RHP: ok wbMETAL: ok wbNITRIDE: ok wbNONMETAL: ok wbDIF: ok wbSILICIDE: ok wbGAAS-LHP: ok wbGAAS-RHP: ok wbMISCRES: ok wbOPTRES: ok CPD: ok DI WATER: ok NITROGEN: ok