Thinfilms morning report 11/10/03
james haydon
jhaydon at snf.stanford.edu
Mon Nov 10 08:43:39 PST 2003
Thinfilms morning report 11/10/03
Balzers: ok
Gryphon: ok
Implanter: ok
Innotec: possible interlock problem
Metalica: ok
STS Dep: water leak should have it fixed in the morning
wbSOLVENT: ok
wbgen-CTB: ok
wbgen-LHP: ok
wbgen-RHP: ok
wbMETAL: ok
wbNITRIDE: ok
wbNONMETAL: QDR not working will replace it with new unit
wbDIF: ok
wbSILICIDE: ok
wbGAAS-LHP: ok
wbGAAS-RHP: ok
wbMISCRES: ok
wbOPTRES: ok
CPD: ok
DI WATER: ok
NITROGEN: ok
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