Thinfilms morning report 12/14/04
james haydon
jhaydon at snf.stanford.edu
Tue Dec 14 13:10:49 PST 2004
Thinfilms Morning Report 12/14/2004
Gryphon: ok
Innotec; ok
STS Dep: ok for oxide recipes
Implanter: ok but low on gases
Metalica: ok
SCT: In start up phase
CPD: ok
WbGen-CTB: ok
WbGen-RHP: ok
WbGen:-LHP: ok
WbGaAs-RHP: ok
WbGaSa-LHP: down for repair will be back up after shut down
WbSilicide: ok
WbDif: ok
WbNonmetal: ok
WbNitride: ok
WbMetal: ok
Wbmiscres: ok
WBOptres: ok
WBSolvent: ok
DI water: ok
LN: ok
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