Thinfilms morning report 12/15/04

james haydon jhaydon at snf.stanford.edu
Wed Dec 15 10:45:10 PST 2004


           

Thinfilms Morning Report 12/15/2004

 

 

Gryphon:            ok

Innotec;            ok

STS Dep:            ok for oxide recipes

Implanter:            ok but low on gases

Metalica:            ok

SCT:                ok

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            down for repair will be back up after shut down

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok

 

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