From jhaydon at snf.stanford.edu Mon Jul 12 09:44:35 2004 From: jhaydon at snf.stanford.edu (james haydon) Date: Mon, 12 Jul 2004 09:44:35 -0700 Subject: Thinfilms morning report 7/12/04 Message-ID: <40F2BFF3.3010305@snf.stanford.edu> Thinfilms Morning Report 7/12/2004 Gryphon: not well have tried 3 new controllers and turbos maybe the fourth one will work. Innotec; ok Balzers : ok STS Dep: leak in nitrogen purge valve on the silane line causes extra long purge cycle ok to use though. Implanter: ok Metalica: ok SCT: In start up phase CPD: ok WbGen-CTB: ok WbGen-RHP: ok WbGen:-LHP: ok WbGaAs-RHP: ok WbGaSa-LHP: ok WbSilicide: ok WbDif: ok WbNonmetal: ok WbNitride: ok WbMetal: ok Wbmiscres: ok WBOptres: ok WBSolvent: ok DI water: ok LN: ok -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhaydon at snf.stanford.edu Tue Jul 13 09:51:13 2004 From: jhaydon at snf.stanford.edu (james haydon) Date: Tue, 13 Jul 2004 09:51:13 -0700 Subject: thinfilms morning report 7/13/04 Message-ID: <40F41301.40105@snf.stanford.edu> Thinfilms Morning Report 7/13/2004 Gryphon: ok new turbo working at this time. Innotec; ok Balzers : ok STS Dep: leak in nitrogen purge valve on the silane line causes extra long purge cycle ok to use though. Implanter: ok Metalica: ok SCT: In start up phase CPD: ok WbGen-CTB: ok WbGen-RHP: ok WbGen:-LHP: ok WbGaAs-RHP: ok WbGaSa-LHP: ok WbSilicide: ok WbDif: ok WbNonmetal: ok WbNitride: ok WbMetal: ok Wbmiscres: ok WBOptres: ok WBSolvent: ok DI water: ok LN: ok -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhaydon at snf.stanford.edu Wed Jul 14 14:43:29 2004 From: jhaydon at snf.stanford.edu (james haydon) Date: Wed, 14 Jul 2004 14:43:29 -0700 Subject: Thinfilms morning report 7/14/04 Message-ID: <40F5A901.3050002@snf.stanford.edu> Thinfilms Morning Report 7/14/2004 Gryphon: ok new turbo working at this time. Innotec; ok Balzers : ok STS Dep: leak in n2 purge valve fixed but the silane mfc is not working correctly should have it back up 7/ 15 04 Implanter: ok Metalica: ok SCT: In start up phase CPD: ok WbGen-CTB: ok WbGen-RHP: ok WbGen:-LHP: ok WbGaAs-RHP: ok WbGaSa-LHP: ok WbSilicide: ok WbDif: ok WbNonmetal: ok WbNitride: ok WbMetal: ok Wbmiscres: ok WBOptres: ok WBSolvent: ok DI water: ok LN: ok -------------- next part -------------- An HTML attachment was scrubbed... URL: From jhaydon at snf.stanford.edu Tue Jul 27 09:32:40 2004 From: jhaydon at snf.stanford.edu (james haydon) Date: Tue, 27 Jul 2004 09:32:40 -0700 Subject: Thinfilms morning report 7/27/04 Message-ID: <410683A8.3090501@snf.stanford.edu> Thinfilms Morning Report 7/27/2004 Gryphon: ok. Innotec; ok Balzers : ok STS Dep: nitrous oxide flow control problems may need to send MFC out for cal Implanter: air sensor problem Metalica: ok SCT: In start up phase CPD: ok WbGen-CTB: ok WbGen-RHP: ok WbGen:-LHP: ok WbGaAs-RHP: ok WbGaSa-LHP: ok WbSilicide: ok WbDif: ok WbNonmetal: ok WbNitride: ok WbMetal: ok Wbmiscres: ok WBOptres: ok WBSolvent: ok DI water: ok LN: ok -------------- next part -------------- An HTML attachment was scrubbed... URL: