Thinfilms morning report 4/15/05

james haydon jhaydon at snf.stanford.edu
Fri Apr 15 10:13:05 PDT 2005


Thinfilms Morning Report 4/15/2005

 

 

Gryphon:            ok

Innotec;            ok

STS Dep:            ok

Implanter:            ok to use but still has some problem with noise on 
the HV. Down for gas flow problem. Hope to get it fixed early next week

Metalica:            ok

SCT:                down bad ion gauge controller

CPD:                ok                   

WbGen-CTB:            ok

WbGen-RHP:            ok

WbGen:-LHP:            ok

WbGaAs-RHP:            ok

WbGaSa-LHP:            ok

WbSilicide:            ok

WbDif: ok

WbNonmetal:            ok

WbNitride:            ok

WbMetal:            ok

Wbmiscres:            ok

WBOptres:            ok

WBSolvent:            ok

DI water:            ok

LN:                  ok

 

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