Thinfilms morning report 4/15/05
james haydon
jhaydon at snf.stanford.edu
Fri Apr 15 10:13:05 PDT 2005
Thinfilms Morning Report 4/15/2005
Gryphon: ok
Innotec; ok
STS Dep: ok
Implanter: ok to use but still has some problem with noise on
the HV. Down for gas flow problem. Hope to get it fixed early next week
Metalica: ok
SCT: down bad ion gauge controller
CPD: ok
WbGen-CTB: ok
WbGen-RHP: ok
WbGen:-LHP: ok
WbGaAs-RHP: ok
WbGaSa-LHP: ok
WbSilicide: ok
WbDif: ok
WbNonmetal: ok
WbNitride: ok
WbMetal: ok
Wbmiscres: ok
WBOptres: ok
WBSolvent: ok
DI water: ok
LN: ok
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