From lindaw at snf.stanford.edu  Wed Jan 10 11:09:39 2001
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Jan 10, 2001 11:09:39 AM
Subject: Problem tylan1 2001-01-10 11:09:38: mfs alarm running constantly in ready mode
Message-ID: <mailman.14.1357938803.25926.tylan1-pcs@snf.stanford.edu>




From pzwahlen at snf.stanford.edu  Fri Jan 19 06:54:59 2001
From: pzwahlen at snf.stanford.edu (pzwahlen at snf.stanford.edu)
Date: Jan 19, 2001 6:54:59 PM
Subject: Problem tylan1 2001-01-19 18:54:58: No O2 gas flow in the chamber?
Message-ID: <mailman.15.1357938803.25926.tylan1-pcs@snf.stanford.edu>

I wanted to grow a 700A thick oxide with the wet900 recipe. I adjusted the steam time to 26 minutes. Instead I got only 160A. I don't know exactly what happened, but I'm suspecting that there was no O2 gas flowing in the chamber.



From seymour at snf.stanford.edu  Mon Jan 22 07:41:21 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 22, 2001 7:41:21 AM
Subject: Problem tylan1 2001-01-10 11:09:38: mfs alarm running constantly in ready mode
Message-ID: <mailman.16.1357938803.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Jan 22 07:42:30 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jan 22, 2001 7:42:30 AM
Subject: Problem tylan1 2001-01-19 18:54:58: O2 flow
Message-ID: <mailman.17.1357938803.25926.tylan1-pcs@snf.stanford.edu>

I ran up the high O2 flow to 1 litre per min and it flowed normally.