From rajesh at snf.stanford.edu Wed Aug 28 10:52:08 2002 From: rajesh at snf.stanford.edu (rajesh at snf.stanford.edu) Date: Aug 28, 2002 10:52:08 AM Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation Message-ID: Hello I was signed up for tylan 1. I see no mention; neither enable, nor reservation by any staff. The tube is in green status. And the TCA test is running in all four tylan tubes. This is completely unfair and unacceptable practice. I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my wafers for over an hour only to find out I can't do any oxidation today. The TCA test has just begun with over 10hrs to go. I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one day perhaps more depending on the reservation situation of both poly and tylan. I don't know what to say. Rajesh From shott at snf.stanford.edu Wed Aug 28 11:35:14 2002 From: shott at snf.stanford.edu (John Shott) Date: Wed, 28 Aug 2002 11:35:14 -0700 Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation Message-ID: <3D6D17E2.78C8731F@snf.stanford.edu> SNF Staff: Rajesh appears to have a good point and a valid complaint. We can't simply trample on other people's reservations without consulting with them first! Also, why isn't this enabled? ... we don't allow "normal" lab members to run equipment without enabling it and the staff should be no different ... in fact, we should be setting the standard! Unless there is something that I'm missing here (and I suggest that they be reasons ... not excuses ...) it seems to me that we collectively owe Rajesh a big apology and should vow to not duplicate this problem .... Many of our problems in the lab stem from bad communication ... and I think that this is another instance of that. We REALLY need to be doing a better job of communicating to our lab members!!! Rajesh, I apologize for what, at present, does appear to be inappropriate commandeering of tylan 1 .... and we will endeavor to not let this sort of thing happen again. John > Hello > I was signed up for tylan 1. I see no mention; neither enable, nor reservation by any > staff. The tube is in green status. > And the TCA test is running in all four tylan tubes. This is completely unfair and > unacceptable practice. > I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my > wafers for over an hour only to find out I can't do any oxidation today. The TCA test has > just begun with over 10hrs to go. > I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one > day perhaps more depending on the reservation situation of both poly and tylan. > I don't know what to say. > Rajesh From latta at snf.stanford.edu Wed Aug 28 11:53:01 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 28 Aug 2002 11:53:01 -0700 (PDT) Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation In-Reply-To: <3D6D17E2.78C8731F@snf.stanford.edu> Message-ID: Folks, I confess; I asked Rajesh to write the message up as a problem. I could not agree more with John. We need to communicate, both with the users and ourselves. I wasn't aware that the TCA testing was going on. Perhaps other staff are not aware that Maurice and I are sharing furnace duties. Had we known, we would have made sure that every effort was made to not put any labmember in Rajesh'e position. Nancy On Wed, 28 Aug 2002, John Shott wrote: > SNF Staff: > > Rajesh appears to have a good point and a valid complaint. We can't simply > trample on other people's reservations without consulting with them first! > Also, why isn't this enabled? ... we don't allow "normal" lab members to run > equipment without enabling it and the staff should be no different ... in > fact, we should be setting the standard! > > Unless there is something that I'm missing here (and I suggest that they be > reasons ... not excuses ...) it seems to me that we collectively owe Rajesh a > big apology and should vow to not duplicate this problem .... > > Many of our problems in the lab stem from bad communication ... and I think > that this is another instance of that. We REALLY need to be doing a better job > of communicating to our lab members!!! > > Rajesh, I apologize for what, at present, does appear to be inappropriate > commandeering of tylan 1 .... and we will endeavor to not let this sort of > thing happen again. > > John > > > Hello > > I was signed up for tylan 1. I see no mention; neither enable, nor reservation by any > > staff. The tube is in green status. > > And the TCA test is running in all four tylan tubes. This is completely unfair and > > unacceptable practice. > > I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my > > wafers for over an hour only to find out I can't do any oxidation today. The TCA test has > > just begun with over 10hrs to go. > > I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one > > day perhaps more depending on the reservation situation of both poly and tylan. > > I don't know what to say. > > Rajesh > From seymour at snf.stanford.edu Wed Aug 28 12:04:31 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 28, 2002 12:04:31 PM Subject: Shutdown tylan1 2002-08-28 12:04:30: tube needs to be cleaned Message-ID: From mcvittie at cis.Stanford.EDU Wed Aug 28 12:16:51 2002 From: mcvittie at cis.Stanford.EDU (Jim McVittie) Date: Wed, 28 Aug 2002 12:16:51 -0700 (PDT) Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation In-Reply-To: Message-ID: Nancy, I know nothing about any TCA testing going on this morning. I ran TCA last night in tubes 1,2,3 and 4 during the time that Gladys had resevred the tubes. Because of flow faults, I aborted the cleans in two of the tubes. The other 2 tubes should have finished within the reserved time. Note that I did shut down tube 2 or 3 and turn off the H2 on that tube because of a H2 leak alarm. Jim On Wed, 28 Aug 2002, Nancy Latta wrote: > Folks, > > I confess; I asked Rajesh to write the message up as a problem. I could > not agree more with John. We need to communicate, both with the users and > ourselves. I wasn't aware that the TCA testing was going on. Perhaps > other staff are not aware that Maurice and I are sharing furnace duties. > Had we known, we would have made sure that every effort was made to not > put any labmember in Rajesh'e position. > > Nancy > > On Wed, 28 Aug 2002, John Shott wrote: > > > SNF Staff: > > > > Rajesh appears to have a good point and a valid complaint. We can't simply > > trample on other people's reservations without consulting with them first! > > Also, why isn't this enabled? ... we don't allow "normal" lab members to run > > equipment without enabling it and the staff should be no different ... in > > fact, we should be setting the standard! > > > > Unless there is something that I'm missing here (and I suggest that they be > > reasons ... not excuses ...) it seems to me that we collectively owe Rajesh a > > big apology and should vow to not duplicate this problem .... > > > > Many of our problems in the lab stem from bad communication ... and I think > > that this is another instance of that. We REALLY need to be doing a better job > > of communicating to our lab members!!! > > > > Rajesh, I apologize for what, at present, does appear to be inappropriate > > commandeering of tylan 1 .... and we will endeavor to not let this sort of > > thing happen again. > > > > John > > > > > Hello > > > I was signed up for tylan 1. I see no mention; neither enable, nor reservation by any > > > staff. The tube is in green status. > > > And the TCA test is running in all four tylan tubes. This is completely unfair and > > > unacceptable practice. > > > I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my > > > wafers for over an hour only to find out I can't do any oxidation today. The TCA test has > > > just begun with over 10hrs to go. > > > I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one > > > day perhaps more depending on the reservation situation of both poly and tylan. > > > I don't know what to say. > > > Rajesh > > > > -- Jim -------------------------------------------------------------- James P. McVittie Senior Research Scientist Allen Center for Integrated Systems jmcvittie at stanford.edu Stanford University Tel: (650) 725-3640 Rm. 336, 330 Serra Mall Fax: (650) 723-4659 Stanford, CA 94305-4075 From rcrane at snf.stanford.edu Wed Aug 28 12:24:22 2002 From: rcrane at snf.stanford.edu (Dick Crane) Date: Wed, 28 Aug 2002 12:24:22 -0700 Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation Message-ID: <3D6D2366.778BBA5C@snf.stanford.edu> Rajesh, Please accept my apologies. The tube suffered a failure. The reservations lists were clear for a 2 1/2 hr TCA getter which started around 0700. A TCA clean was performed last night which caused a clogging of the injector quartzware. Diff maintenance replaced injectors and stainless flexlines this morning and were worried about possible contamination. The clean was scheduled to be completed prior to your reservation. Tylan1 suffered a gettering failure which caused a carbon deposition in the tube. Tylan1 will need to be pulled and cleaned and the root problem repaired. Sorry for the major inconvenience, Dick From mtang at snf.stanford.edu Wed Aug 28 19:27:04 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 28 Aug 2002 19:27:04 -0700 Subject: Use of Steam in Ox Furnaces Message-ID: <3D6D8678.8B0E56A0@snf.stanford.edu> I'm forwarding a note that Nancy wrote (below) as a warning for use of oxidation furnaces... We'll keep you posted... Mary ------------------- Folks, During TCA testing last night or this morning crud, probably from either the TCA bubbler or the TCA lines to oxditation tubes 1-4, was introducted into the tubes via the injectors. A short TCA dry clean was performed after the TCA lines were replaced, so we are fairly confident that the tubes are not contaminated. There may, however, be an issue when the injectors have gases flowing through them. Rather than shut down all the funaces, we are sending this warning against using wet programs in tylans1-4. If possible, please delay your steam oxidation processing until we have more information. A message describing all the events and issues should be forthcoming, but since you have all reserved ox furnaces for tonight or tomorrow morning you are receiving this advance warning. Thanks and appologies for any confusion of hassle this causes. Nancy -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mcvittie at snf.stanford.edu Thu Aug 29 07:30:25 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 29, 2002 7:30:25 PM Subject: Shutdown tylan1 2002-08-28 12:04:30: tube needs to be cleaned---Done Message-ID: From mcvittie at snf.stanford.edu Thu Aug 29 07:31:50 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 29, 2002 7:31:50 PM Subject: Problem tylan1 2002-08-28 10:52:08: Can't do oxidation --- Parts replaced Message-ID: Ran Steam Clean with no problem. Jim From mcvittie at snf.stanford.edu Thu Aug 29 07:32:51 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 29, 2002 7:32:51 PM Subject: Problem tylan1 2002-08-29 19:32:50: Waiting for changes in TCA system Message-ID: