Problem tylan1 2002-08-28 10:52:08: Can't do oxidation

Nancy Latta latta at
Wed Aug 28 11:53:01 PDT 2002


I confess; I asked Rajesh to write the message up as a problem.  I could
not agree more with John.  We need to communicate, both with the users and
ourselves.  I wasn't aware that the TCA testing was going on.  Perhaps
other staff are not aware that Maurice and I are sharing furnace duties.
Had we known, we would have made sure that every effort was made to not
put any labmember in Rajesh'e position.


On Wed, 28 Aug 2002, John Shott wrote:

> SNF Staff:
> Rajesh appears to have a good point and a valid complaint.  We can't simply
> trample on other people's reservations without consulting with them first! 
> Also, why isn't this enabled? ... we don't allow "normal" lab members to run
> equipment without enabling it and the staff should be no different ... in
> fact, we should be setting the standard!
> Unless there is something that I'm missing here (and I suggest that they be
> reasons ... not excuses ...) it seems to me that we collectively owe Rajesh a
> big apology and should vow to not duplicate this problem ....
> Many of our problems in the lab stem from bad communication ... and I think
> that this is another instance of that. We REALLY need to be doing a better job
> of communicating to our lab members!!!
> Rajesh, I apologize for what, at present, does appear to be inappropriate
> commandeering of tylan 1 .... and we will endeavor to not let this sort of
> thing happen again.
> John
> > Hello
> > I was signed up for tylan 1.  I see no mention; neither enable, nor reservation by any
> > staff. The tube is in green status.
> >  And the TCA test is running in all four tylan tubes. This is completely unfair and
> > unacceptable practice.
> > I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my
> > wafers for over an hour only to find out I can't do any oxidation today. The TCA test has
> > just begun with over 10hrs to go.
> > I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one
> > day perhaps more depending on the reservation situation of both poly and tylan.
> > I don't know what to say.
> > Rajesh

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