Problem tylan1 2002-08-28 10:52:08: Can't do oxidation
mcvittie at cis.Stanford.EDU
Wed Aug 28 12:16:51 PDT 2002
I know nothing about any TCA testing going on this morning. I ran TCA last
night in tubes 1,2,3 and 4 during the time that Gladys had resevred the
tubes. Because of flow faults, I aborted the cleans in two of the tubes.
The other 2 tubes should have finished within the reserved time. Note that
I did shut down tube 2 or 3 and turn off the H2 on that tube because of a
H2 leak alarm.
On Wed, 28 Aug 2002, Nancy Latta wrote:
> I confess; I asked Rajesh to write the message up as a problem. I could
> not agree more with John. We need to communicate, both with the users and
> ourselves. I wasn't aware that the TCA testing was going on. Perhaps
> other staff are not aware that Maurice and I are sharing furnace duties.
> Had we known, we would have made sure that every effort was made to not
> put any labmember in Rajesh'e position.
> On Wed, 28 Aug 2002, John Shott wrote:
> > SNF Staff:
> > Rajesh appears to have a good point and a valid complaint. We can't simply
> > trample on other people's reservations without consulting with them first!
> > Also, why isn't this enabled? ... we don't allow "normal" lab members to run
> > equipment without enabling it and the staff should be no different ... in
> > fact, we should be setting the standard!
> > Unless there is something that I'm missing here (and I suggest that they be
> > reasons ... not excuses ...) it seems to me that we collectively owe Rajesh a
> > big apology and should vow to not duplicate this problem ....
> > Many of our problems in the lab stem from bad communication ... and I think
> > that this is another instance of that. We REALLY need to be doing a better job
> > of communicating to our lab members!!!
> > Rajesh, I apologize for what, at present, does appear to be inappropriate
> > commandeering of tylan 1 .... and we will endeavor to not let this sort of
> > thing happen again.
> > John
> > > Hello
> > > I was signed up for tylan 1. I see no mention; neither enable, nor reservation by any
> > > staff. The tube is in green status.
> > > And the TCA test is running in all four tylan tubes. This is completely unfair and
> > > unacceptable practice.
> > > I was planning on doing a gate oxidation step followed by poly deposition. I cleaned my
> > > wafers for over an hour only to find out I can't do any oxidation today. The TCA test has
> > > just begun with over 10hrs to go.
> > > I have essentially wasted my time cleaning wafers. Not to mention the delay of atleast one
> > > day perhaps more depending on the reservation situation of both poly and tylan.
> > > I don't know what to say.
> > > Rajesh
James P. McVittie Senior Research Scientist
Allen Center for Integrated Systems jmcvittie at stanford.edu
Stanford University Tel: (650) 725-3640
Rm. 336, 330 Serra Mall Fax: (650) 723-4659
Stanford, CA 94305-4075
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