From yyao at snf.stanford.edu Sun Dec 15 09:33:48 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Dec 15, 2002 9:33:48 PM Subject: Problem tylan1 2002-12-15 21:33:46: bad uniformity (right boat, 3200--4400A) Message-ID: From tberg at snf.stanford.edu Wed Dec 18 09:48:58 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Dec 18, 2002 9:48:58 AM Subject: Shutdown tylan1 2002-12-18 09:48:58: Bad uniformity Message-ID: Replacing torch From latta at snf.stanford.edu Wed Dec 18 17:06:18 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 18 Dec 2002 17:06:18 -0800 Subject: Uniformity test after bad uniformity reported Message-ID: <3E011B8A.97FA2D3B@snf.stanford.edu> A lab member reported bad unifomity after WET1100 for 00:17:00. The unifromity problems amy have been enhanced because the wafers had been dope in tylan5. However, the unifomity is about 15%, not good. Wf Center Top Bottom Right Left F 1132 1.465 937 1.469 865 1.469 911 1.469 907 1.469 2 937 1.469 961 1.469 906 1.469 947 1.468 935 1.469 3 1010 1.466 981 1.468 936 1.469 969 1.468 961 1.469 B 987 1.468 995 1.468 978 1.469 911 1.468 981 1.469 (if these results look familiar, it is because they were posted incorrectly as the results for tylan2) Injector replaced and new uniformity test ordered. -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From gladys at snf.stanford.edu Thu Dec 19 02:07:07 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Dec 19, 2002 2:07:07 PM Subject: Shutdown tylan1 2002-12-18 09:48:58: Bad uniformity: testrun looks good Message-ID: From gladys at snf.stanford.edu Thu Dec 19 02:08:03 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Dec 19, 2002 2:08:03 PM Subject: Problem tylan1 2002-12-15 21:33:46: bad uniformity (right boat, 3200--4400A)reported twice Message-ID: