Problem tylan1 2003-01-30 11:17:22: oxide uniformity

chen0622 at snf.stanford.edu chen0622 at snf.stanford.edu
Thu Jan 30 11:17:23 PST 2003


I ran a recipe WET1050 for 50 min for a batch of 6 wafers.  And found out the oxide uniformity on the wafer.  The color difference can easily been seen between wafer center area and edge area.  The thickness difference is about 300 to 400 A. 




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