From seymour at snf.stanford.edu  Thu Mar 20 09:48:39 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 20, 2003 9:48:39 AM
Subject: Shutdown tylan1 2003-03-20 09:48:37: Report Shutdown for tylan1
Message-ID: <mailman.92.1357938804.25926.tylan1-pcs@snf.stanford.edu>

door orings need changing



From seymour at snf.stanford.edu  Thu Mar 20 11:12:59 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 20, 2003 11:12:59 AM
Subject: Shutdown tylan1 2003-03-20 09:48:37: Report Clear for tylan1
Message-ID: <mailman.93.1357938804.25926.tylan1-pcs@snf.stanford.edu>

door orings changed need to run NEWTCA then tube is up



From hector at snf.stanford.edu  Sat Mar 22 06:39:44 2003
From: hector at snf.stanford.edu (hector at snf.stanford.edu)
Date: Mar 22, 2003 6:39:44 AM
Subject: Problem tylan1 2003-03-22 06:39:44: extreme nonuniformity -> WET900
Message-ID: <mailman.94.1357938804.25926.tylan1-pcs@snf.stanford.edu>

1500A nonuniformity across wafer
3000A nonuniformity across tube
tried for 8000A, got 4500A - 7500A



From seymour at snf.stanford.edu  Tue Mar 25 09:48:52 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 25, 2003 9:48:52 AM
Subject: Shutdown tylan1 2003-03-25 09:48:51: Report Shutdown for tylan1
Message-ID: <mailman.95.1357938804.25926.tylan1-pcs@snf.stanford.edu>

checking torch



From seymour at snf.stanford.edu  Tue Mar 25 10:04:00 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 25, 2003 10:04:00 AM
Subject: Shutdown tylan1 2003-03-25 09:48:51: Report Clear for tylan1
Message-ID: <mailman.96.1357938804.25926.tylan1-pcs@snf.stanford.edu>

torch looks great



From gladys at snf.stanford.edu  Tue Mar 25 05:54:57 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mar 25, 2003 5:54:57 PM
Subject: Shutdown tylan1 2003-03-25 17:54:56: Report Shutdown for tylan1
Message-ID: <mailman.97.1357938804.25926.tylan1-pcs@snf.stanford.edu>

35%off the target thickness, wafer to wafer is non uniform



From gladys at snf.stanford.edu  Thu Mar 27 04:10:06 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mar 27, 2003 4:10:06 PM
Subject: Shutdown tylan1 2003-03-25 17:54:56: Report Clear for tylan1
Message-ID: <mailman.98.1357938804.25926.tylan1-pcs@snf.stanford.edu>

testrun completed, ok to use



From gladys at snf.stanford.edu  Thu Mar 27 04:10:50 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mar 27, 2003 4:10:50 PM
Subject: Problem tylan1 2003-03-22 06:39:44: Report Clear for tylan1
Message-ID: <mailman.99.1357938804.25926.tylan1-pcs@snf.stanford.edu>

testrun completed, ok to use



From zappe at snf.stanford.edu  Mon Mar 31 11:03:17 2003
From: zappe at snf.stanford.edu (zappe at snf.stanford.edu)
Date: Mar 31, 2003 11:03:17 PM
Subject: Problem tylan1 2003-03-31 23:03:16: Wafer broke inside furnace
Message-ID: <mailman.100.1357938804.25926.tylan1-pcs@snf.stanford.edu>

Must have happened at the beginning of the oxidation run since the edges are oxidized. Possible reason: the wafer was sitting too tight in the slots of the boat. Some pieces remain in the tube.