Problem tylan1 2003-03-22 06:39:44: extreme nonuniformity -> WET900
hector at snf.stanford.edu
hector at snf.stanford.edu
Sat Mar 22 06:39:44 PST 2003
1500A nonuniformity across wafer
3000A nonuniformity across tube
tried for 8000A, got 4500A - 7500A
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