Problem tylan1 2003-03-31 23:03:16: Wafer broke inside furnace

zappe at snf.stanford.edu zappe at snf.stanford.edu
Mon Mar 31 11:03:17 PST 2003


Must have happened at the beginning of the oxidation run since the edges are oxidized. Possible reason: the wafer was sitting too tight in the slots of the boat. Some pieces remain in the tube.




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