From tejask at snf.stanford.edu Tue Jun 1 07:33:08 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Tue, 1 Jun 2004 07:33:08 -0700 Subject: Problem tylan1 2004-06-01 07:33:08: boat did not go in Message-ID: After pressing alarm ack boat did not go in. Could not manually send the boat in either. Had to abort recipe and re-run...worked the second time. From flannery at snf.stanford.edu Wed Jun 2 22:21:41 2004 From: flannery at snf.stanford.edu (flannery at snf.stanford.edu) Date: Wed, 2 Jun 2004 22:21:41 -0700 Subject: Problem tylan1 2004-06-02 22:21:40: Non-uniformity and undergrowth Message-ID: There was a visible non-uniformity in the oxide. Target was 4000 A using WET1050. Time was 39 minutes. Result was 3298 +/- 108 A. Color banding was visible. From mdickey at snf.stanford.edu Thu Jun 3 07:08:39 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Jun 2004 07:08:39 -0700 Subject: Problem tylan1 2004-06-02 22:21:40: Non-uniformity and undergrowth Message-ID: Replaced injector and adjusted door From mdickey at snf.stanford.edu Thu Jun 3 07:27:06 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 3 Jun 2004 07:27:06 -0700 Subject: Problem tylan1 2004-06-03 07:27:05: Test Message-ID: System needs a test From sanli at snf.stanford.edu Thu Jun 3 17:14:01 2004 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Thu, 3 Jun 2004 17:14:01 -0700 Subject: Problem tylan1 2004-06-03 17:14:00: the boat did not go in smoothly. Message-ID: the boat did not go in smoothly. I had to push a little bit. Otherwide the run went smooth. It was DRY1000 for 4 hours From tejask at snf.stanford.edu Fri Jun 4 01:42:37 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Fri, 4 Jun 2004 01:42:37 -0700 Subject: Shutdown tylan1 2004-06-04 01:42:35: Boat did not go in Message-ID: After repeated attempts, was finally able to send it in manually. Oxide films were thinner than expected and quite non-uniform. From mdickey at snf.stanford.edu Fri Jun 4 07:11:57 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 4 Jun 2004 07:11:57 -0700 Subject: Shutdown tylan1 2004-06-04 01:42:35: Boat did not go in Message-ID: Tightened clutch cable and adjusted motor shaft pulley. Did a boat in check and there were no problems. Also cleaned the rail. From mdickey at snf.stanford.edu Fri Jun 4 07:12:45 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 4 Jun 2004 07:12:45 -0700 Subject: Problem tylan1 2004-06-03 17:14:00: the boat did not go in smoothly. Message-ID: Boat in problem fixed for the moment but there is a uniformity issue. From mdickey at snf.stanford.edu Fri Jun 4 07:13:07 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 4 Jun 2004 07:13:07 -0700 Subject: Problem tylan1 2004-06-01 07:33:08: boat did not go in Message-ID: Problem addressed From mdickey at snf.stanford.edu Fri Jun 4 07:13:44 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 4 Jun 2004 07:13:44 -0700 Subject: Problem tylan1 2004-06-04 07:13:44: Uniformity Message-ID: There appears to be a unformity issue. Perhaps another test needs to be done. From gladys at snf.stanford.edu Mon Jun 7 15:37:49 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mon, 7 Jun 2004 15:37:49 -0700 Subject: Problem tylan1 2004-06-04 07:13:44: Uniformity Message-ID: testrun completed, ok to use. From gladys at snf.stanford.edu Mon Jun 7 15:38:17 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Mon, 7 Jun 2004 15:38:17 -0700 Subject: Problem tylan1 2004-06-03 07:27:05: Test Message-ID: testrun done, 6/7/04 From latta at snf.stanford.edu Fri Jun 11 11:14:24 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 11 Jun 2004 11:14:24 -0700 Subject: Problem tylan1 2004-06-11 11:14:22: mixing chamber baffle has a hole in it. Message-ID: Last run looks uniform (it was pretty thick....). Next user was waiting, so he has gone ahead with his oxidation. From mdickey at snf.stanford.edu Mon Jun 14 08:56:27 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 14 Jun 2004 08:56:27 -0700 Subject: Comment tylan1 2004-06-14 08:56:26: Baffle Message-ID: The end baffle has been replaced From latta at snf.stanford.edu Tue Jun 15 17:07:38 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 15 Jun 2004 17:07:38 -0700 Subject: Problem tylan1 2004-06-15 17:07:38: Loader problem again Message-ID: Noticed that the wafers were out of the tube, and the program was in atep 15 (ramp up) and very hot (about 1000C). So I think that the loader interlock, those cute little flags, are not working. The boats were about 6 inches pushed in only. From latta at snf.stanford.edu Tue Jun 15 17:07:58 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 15 Jun 2004 17:07:58 -0700 Subject: Problem tylan1 2004-06-11 11:14:22: mixing chamber baffle has a hole in it. Message-ID: replaced From latta at snf.stanford.edu Tue Jun 15 17:08:09 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 15 Jun 2004 17:08:09 -0700 Subject: Comment tylan1 2004-06-14 08:56:26: Baffle Message-ID: From mdickey at snf.stanford.edu Wed Jun 16 06:42:19 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 16 Jun 2004 06:42:19 -0700 Subject: Problem tylan1 2004-06-15 17:07:38: Loader problem again Message-ID: started a recipe and observed the loader boating in and out. Could not duplicate the problem From vossough at snf.stanford.edu Thu Jun 24 08:02:38 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Thu, 24 Jun 2004 08:02:38 -0700 Subject: Comment tylan1 SNF 2004-06-24 08:02:38: oxide thickness Message-ID: Had an 11 hour oxidation run targetting 2.0 um thickness. Measured about 7900 A on nanospec. From seymour at snf.stanford.edu Thu Jun 24 08:35:46 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 24 Jun 2004 08:35:46 -0700 Subject: Comment tylan1 SNF 2004-06-24 08:35:43: RE: oxide thickness Message-ID: Checked and adjusted MSF460 zeros. The MSF460 appears ok at this time. I also checked door interlock and found it functioning properly. I will keep an eye on this tube and thickness results From sanda at snf.stanford.edu Fri Jun 25 17:54:44 2004 From: sanda at snf.stanford.edu (sanda at snf.stanford.edu) Date: Fri, 25 Jun 2004 17:54:44 -0700 Subject: Shutdown tylan1 SNF 2004-06-25 17:54:43: mfs os tylan1 keeps alarming. Message-ID: mfs os tylan1 keeps alarming. From seymour at snf.stanford.edu Mon Jun 28 09:40:08 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Jun 2004 09:40:08 -0700 Subject: Comment tylan1 SNF 2004-06-24 08:35:43: RE: oxide thickness Message-ID: changed N2 opamp From seymour at snf.stanford.edu Mon Jun 28 09:41:20 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 28 Jun 2004 09:41:20 -0700 Subject: Shutdown tylan1 SNF 2004-06-25 17:54:43: mfs os tylan1 keeps alarming. Message-ID: Replaced N2 op amp and null pot. adjusted zero after warm up and did auto zero routine. removing shutdown. From seymour at snf.stanford.edu Tue Jun 29 08:04:35 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 29 Jun 2004 08:04:35 -0700 Subject: Problem tylan1 SNF 2004-06-29 08:04:34: slave computer lockup Message-ID: I had to abort the recipe to reset the tube computer. There was an unresettable alarm and all tube functions locked up.