Problem tylan1 2004-06-15 17:07:38: Loader problem again

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Jun 15 17:07:38 PDT 2004


Noticed that the wafers were out of the tube, and the program was in atep 15 (ramp up) and very hot (about 1000C).  So I think that the loader interlock, those cute little flags, are not working.  The boats were about 6 inches pushed in only.




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