Shutdown tylan1 2004-05-25 17:23:26: MFS alarm

seymour at snf.stanford.edu seymour at snf.stanford.edu
Wed May 26 09:42:35 PDT 2004


found N2 mfc zero drifted and alarmed when N2 turned off. The alarm was silenced but when recipe turned N2 on agoin it went to the N2 leak alarm and would not silence and locked up the MFS460 and recipe operation. I adjusted N2 MFC zero and did an auto zero routine on the MFS460 controller. 
N2 now working normal. All other MFC's checked for operationn and they were good.




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