From seymour at snf.stanford.edu  Mon Feb  7 16:08:32 2005
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 7 Feb 2005 16:08:32 -0800
Subject: Comment tylan1 SNF 2005-02-07 16:08:31: needs  trals lc clean
Message-ID: <mailman.189.1357938805.25926.tylan1-pcs@snf.stanford.edu>

Replaced injector needs clean cycle.



From latta at snf.stanford.edu  Mon Feb  7 17:11:04 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mon, 7 Feb 2005 17:11:04 -0800
Subject: Problem tylan1 SNF 2005-01-11 14:09:54: thickness problem
Message-ID: <mailman.190.1357938805.25926.tylan1-pcs@snf.stanford.edu>

Standard uniformity check performed.
Uniformity across the load, wafer-to-wafer, about +/- 5%
Within a wafer +/- 3-4%
Injector replaced.



From latta at snf.stanford.edu  Mon Feb  7 17:11:23 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mon, 7 Feb 2005 17:11:23 -0800
Subject: Comment tylan1 SNF 2005-02-07 16:08:31: needs  trals lc clean
Message-ID: <mailman.191.1357938805.25926.tylan1-pcs@snf.stanford.edu>

TLCCLEAN program run.



From latta at snf.stanford.edu  Mon Feb  7 17:12:58 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mon, 7 Feb 2005 17:12:58 -0800
Subject: Comment tylan1 SNF 2005-02-07 17:12:57: needs another uniformity ck
Message-ID: <mailman.192.1357938805.25926.tylan1-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Wed Feb  9 11:47:26 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 9 Feb 2005 11:47:26 -0800
Subject: Comment tylan1 SNF 2005-02-09 11:47:26: Uniformity test after injector replacement
Message-ID: <mailman.193.1357938805.25926.tylan1-pcs@snf.stanford.edu>

Slightly better results;
Across the 50 wafer load- +/- 3%
Within a wafer- +/- 3.5%
(front wafer may have thrown results off as it was not as uniform as the other wafers.



From latta at snf.stanford.edu  Wed Feb  9 11:48:06 2005
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 9 Feb 2005 11:48:06 -0800
Subject: Comment tylan1 SNF 2005-02-07 17:12:57: needs another uniformity ck
Message-ID: <mailman.194.1357938805.25926.tylan1-pcs@snf.stanford.edu>

test done



From dwburns at snf.stanford.edu  Thu Feb 24 05:22:39 2005
From: dwburns at snf.stanford.edu (dwburns at snf.stanford.edu)
Date: Thu, 24 Feb 2005 05:22:39 -0800
Subject: Problem tylan1 SNF 2005-02-24 05:22:37: O2 MFC alarm has been sounding throughout the night.
Message-ID: <mailman.195.1357938805.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Feb 28 08:24:10 2005
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Feb 2005 08:24:10 -0800
Subject: Shutdown tylan1 SNF 2005-02-28 08:24:09: MFS alarms
Message-ID: <mailman.196.1357938805.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Feb 28 09:14:30 2005
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Feb 2005 09:14:30 -0800
Subject: Shutdown tylan1 SNF 2005-02-28 08:24:09: MFS alarms
Message-ID: <mailman.197.1357938805.25926.tylan1-pcs@snf.stanford.edu>

Replaced N2 op amp did auto zero. The  MFS 460 controls gas flow now with out the alarms.



From seymour at snf.stanford.edu  Mon Feb 28 09:15:38 2005
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 28 Feb 2005 09:15:38 -0800
Subject: Problem tylan1 SNF 2005-02-24 05:22:37: O2 MFC alarm has been sounding throughout the night.
Message-ID: <mailman.198.1357938805.25926.tylan1-pcs@snf.stanford.edu>

after repair and complete checkout of the MFS460 no more alarms.



From tberg at snf.stanford.edu  Mon Feb 28 09:18:17 2005
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 28 Feb 2005 09:18:17 -0800
Subject: Comment tylan1 SNF 2005-02-09 11:47:26: Uniformity test after injector replacement
Message-ID: <mailman.199.1357938805.25926.tylan1-pcs@snf.stanford.edu>

noted