Problem tylan1 SNF 2005-01-11 14:09:54: thickness problem

latta at snf.stanford.edu latta at snf.stanford.edu
Mon Feb 7 17:11:04 PST 2005


Standard uniformity check performed.
Uniformity across the load, wafer-to-wafer, about +/- 5%
Within a wafer +/- 3-4%
Injector replaced.




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