Comment tylan1 SNF 2005-02-09 11:47:26: Uniformity test after injector replacement

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Feb 9 11:47:26 PST 2005


Slightly better results;
Across the 50 wafer load- +/- 3%
Within a wafer- +/- 3.5%
(front wafer may have thrown results off as it was not as uniform as the other wafers.




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