From haniff at snf.stanford.edu  Tue Jan  4 18:31:11 2005
From: haniff at snf.stanford.edu (haniff at snf.stanford.edu)
Date: Tue, 4 Jan 2005 18:31:11 -0800
Subject: Problem tylan1 SNF 2005-01-04 18:31:10: broken wand tip
Message-ID: <mailman.186.1357938805.25926.tylan1-pcs@snf.stanford.edu>

For tylan 1 and 2



From mdickey at snf.stanford.edu  Wed Jan  5 06:29:38 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 5 Jan 2005 06:29:38 -0800
Subject: Problem tylan1 SNF 2005-01-04 18:31:10: broken wand tip
Message-ID: <mailman.187.1357938805.25926.tylan1-pcs@snf.stanford.edu>

Replaced wand and tip



From vossough at snf.stanford.edu  Tue Jan 11 14:09:55 2005
From: vossough at snf.stanford.edu (vossough at snf.stanford.edu)
Date: Tue, 11 Jan 2005 14:09:55 -0800
Subject: Problem tylan1 SNF 2005-01-11 14:09:54: thickness problem
Message-ID: <mailman.188.1357938805.25926.tylan1-pcs@snf.stanford.edu>

A previously used run (11 hours) that  should have provided 2um thick oxide, resulted in 1.2um only. There may have been anMFC alarm during the run.