Problem tylan1 SNF 2005-01-11 14:09:54: thickness problem

vossough at snf.stanford.edu vossough at snf.stanford.edu
Tue Jan 11 14:09:55 PST 2005


A previously used run (11 hours) that  should have provided 2um thick oxide, resulted in 1.2um only. There may have been anMFC alarm during the run.




More information about the tylan1-pcs mailing list