Problem tylan1 SNF 2006-04-02 00:32:14: TEMPS (source-end) unstable

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Apr 2 00:32:15 PST 2006


To add to King's comment, TEMPS (the source end temperature readout) actually fluctuates between TARGET+10 and TARGET-10 degrees, with a period of 5-10 minutes.  We did a test run (WET1000 for 2.5 hours) with test wafers in all three zones (S/C/L) and got essentially identical oxide thicknesses (6350A) in the three zones.  But short runs might show variation at the Source end.




More information about the tylan1-pcs mailing list