From seymour at snf.stanford.edu Thu Jul 6 08:30:57 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:30:57 -0700 Subject: Shutdown tylan1 SNF 2006-06-28 13:08:59: Fitting Message-ID: Checked and adjusted all channels in the MFS460. tested gas flow for alarms, found none this time. Started a clean cycle and Nancy watch its progress after I left for home. Clean ok. naancy to do a test run this morning. From seymour at snf.stanford.edu Thu Jul 6 08:31:20 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:31:20 -0700 Subject: Comment tylan1 SNF 2006-06-28 10:31:13: TLCCLEAN run Message-ID: faulted durning clean From seymour at snf.stanford.edu Thu Jul 6 08:31:47 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:31:47 -0700 Subject: Comment tylan1 SNF 2006-06-22 14:16:29: process qual after torch replacement Message-ID: noted From seymour at snf.stanford.edu Thu Jul 6 08:32:15 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:32:15 -0700 Subject: Comment tylan1 SNF 2006-06-08 10:37:56: process qual- June Message-ID: noted From seymour at snf.stanford.edu Thu Jul 6 08:32:50 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:32:50 -0700 Subject: Comment tylan1 SNF 2006-07-06 08:32:49: process testing after repair Message-ID: From latta at snf.stanford.edu Thu Jul 6 09:43:03 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Jul 2006 09:43:03 -0700 Subject: Comment tylan1 SNF 2006-07-06 09:43:02: TLCCLEAN ran 7/6/06- new tube Message-ID: From latta at snf.stanford.edu Thu Jul 6 15:05:21 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Jul 2006 15:05:21 -0700 Subject: Comment tylan1 SNF 2006-07-06 08:32:49: process testing after repair Message-ID: tested and results are in comments From latta at snf.stanford.edu Thu Jul 6 15:08:15 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 6 Jul 2006 15:08:15 -0700 Subject: Comment tylan1 SNF 2006-07-06 15:08:14: Process qual 7/6/06 Message-ID: WET900 00:39:00 Average all wafers = 909A Wafer-to-wafer = 2.5% Within-a-wafer = 4% (not as good as last month, but acceptable) From iwjung at snf.stanford.edu Thu Jul 13 03:23:14 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Thu, 13 Jul 2006 03:23:14 -0700 Subject: Problem tylan1 SNF 2006-07-13 03:23:13: MFS alarm Message-ID: Ar/N2 LED blinking with MFS alarm. MFS error: 08 There seems to be no N2 flow during rampdown step 35. From tberg at snf.stanford.edu Tue Jul 18 06:32:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Jul 2006 06:32:49 -0700 Subject: Comment tylan1 SNF 2006-07-06 09:43:02: TLCCLEAN ran 7/6/06- new tube Message-ID: noted From tberg at snf.stanford.edu Tue Jul 18 06:33:01 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Jul 2006 06:33:01 -0700 Subject: Comment tylan1 SNF 2006-07-06 15:08:14: Process qual 7/6/06 Message-ID: noted From tberg at snf.stanford.edu Tue Jul 18 06:33:26 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Tue, 18 Jul 2006 06:33:26 -0700 Subject: Problem tylan1 SNF 2006-07-13 03:23:13: MFS alarm Message-ID: resolved