From latta at snf.stanford.edu Tue Jun 6 14:48:23 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 6 Jun 2006 14:48:23 -0700 Subject: Shutdown tylan1 SNF 2006-06-06 14:48:22: grow rate 50% higher Message-ID: From latta at snf.stanford.edu Wed Jun 7 09:49:54 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Jun 2006 09:49:54 -0700 Subject: Shutdown tylan1 SNF 2006-06-06 14:48:22: grow rate 50% higher Message-ID: THinkness fine for program run- operator error.... From tberg at snf.stanford.edu Thu Jun 8 06:20:15 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Jun 2006 06:20:15 -0700 Subject: Problem tylan1 SNF 2006-05-14 11:09:10: MFS Alarm during oxidation Message-ID: noted From tberg at snf.stanford.edu Thu Jun 8 06:20:49 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 8 Jun 2006 06:20:49 -0700 Subject: Problem tylan1 SNF 2006-05-24 09:51:56: N2 carr low Message-ID: has runsince no problem From latta at snf.stanford.edu Thu Jun 8 10:37:58 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 10:37:58 -0700 Subject: Comment tylan1 SNF 2006-06-08 10:37:56: process qual- June Message-ID: over 50 wafer spread; wafer-to-wafer = 2.6% within a wafer = 1.7% From ifushman at snf.stanford.edu Sun Jun 11 15:48:24 2006 From: ifushman at snf.stanford.edu (ifushman at snf.stanford.edu) Date: Sun, 11 Jun 2006 15:48:24 -0700 Subject: Comment tylan1 SNF 2006-06-11 15:48:23: done early Message-ID: done early. -ilya From mdickey at snf.stanford.edu Tue Jun 13 07:17:47 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Jun 2006 07:17:47 -0700 Subject: Shutdown tylan1 SNF 2006-06-13 07:17:47: Source Message-ID: Down for source change From mdickey at snf.stanford.edu Tue Jun 13 07:30:21 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Jun 2006 07:30:21 -0700 Subject: Shutdown tylan1 SNF 2006-06-13 07:17:47: Source Message-ID: Source replaced From latta at snf.stanford.edu Tue Jun 13 10:07:22 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Jun 2006 10:07:22 -0700 Subject: Comment tylan1 SNF 2006-06-11 15:48:23: done early Message-ID: From mislam at snf.stanford.edu Wed Jun 21 15:16:59 2006 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 21 Jun 2006 15:16:59 -0700 Subject: Problem tylan1 SNF 2006-06-21 15:16:59: Oxide Thickness way off Message-ID: Ran wet1100 for 2hrs 15min, expecting 1um. Got ~2000A with of 400A from front to back. Bubbler out? From mdickey at snf.stanford.edu Thu Jun 22 06:41:24 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 22 Jun 2006 06:41:24 -0700 Subject: Shutdown tylan1 SNF 2006-06-22 06:41:23: Fittings Message-ID: Down for torch fitting replacement From mdickey at snf.stanford.edu Thu Jun 22 07:19:52 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 22 Jun 2006 07:19:52 -0700 Subject: Comment tylan1 SNF 2006-06-22 07:19:52: Test Message-ID: Test needed after replacing torch and fittings From latta at snf.stanford.edu Thu Jun 22 11:34:28 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 11:34:28 -0700 Subject: Comment tylan1 SNF 2006-06-22 11:34:27: TLCCLEAN run 6/20 Message-ID: From latta at snf.stanford.edu Thu Jun 22 14:13:29 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:13:29 -0700 Subject: Comment tylan1 SNF 2006-06-22 07:19:52: Test Message-ID: test completed- good, better than last test! See comment for details..... From latta at snf.stanford.edu Thu Jun 22 14:14:04 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:14:04 -0700 Subject: Shutdown tylan1 SNF 2006-06-22 06:41:23: Fittings Message-ID: fittings replaced, torch replaced, tested. From latta at snf.stanford.edu Thu Jun 22 14:14:23 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:14:23 -0700 Subject: Problem tylan1 SNF 2006-06-21 15:16:59: Oxide Thickness way off Message-ID: Melted torch fitting. From latta at snf.stanford.edu Thu Jun 22 14:16:29 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 14:16:29 -0700 Subject: Comment tylan1 SNF 2006-06-22 14:16:29: process qual after torch replacement Message-ID: WET900, 00:39:00 Average all wafers = 934 Wafer-to-wafer = 1.3% Within a wafer = 0.9% Better than June's qual tests! From latta at snf.stanford.edu Wed Jun 28 10:30:56 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:30:56 -0700 Subject: Comment tylan1 SNF 2006-06-22 11:34:27: TLCCLEAN run 6/20 Message-ID: From latta at snf.stanford.edu Wed Jun 28 10:31:14 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:31:14 -0700 Subject: Comment tylan1 SNF 2006-06-28 10:31:13: TLCCLEAN run Message-ID: From mdickey at snf.stanford.edu Wed Jun 28 13:08:59 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 28 Jun 2006 13:08:59 -0700 Subject: Shutdown tylan1 SNF 2006-06-28 13:08:59: Fitting Message-ID: Down for melted tube fitting