From mislam at snf.stanford.edu  Tue Apr 17 16:50:06 2007
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Tue, 17 Apr 2007 16:50:06 -0700
Subject: Problem tylan1 SNF 2007-04-17 16:50:05: bad T/C TEMPS
Message-ID: <mailman.399.1357938807.25926.tylan1-pcs@snf.stanford.edu>




From mtang at snf.stanford.edu  Wed Apr 18 09:11:39 2007
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Wed, 18 Apr 2007 09:11:39 -0700
Subject: Shutdown tylan1 SNF 2007-04-18 09:11:38: Bad TC Reported
Message-ID: <mailman.400.1357938807.25926.tylan1-pcs@snf.stanford.edu>

Being investigated.  Likely just spike readout.



From seymour at snf.stanford.edu  Wed Apr 25 11:25:36 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 25 Apr 2007 11:25:36 -0700
Subject: Shutdown tylan1 SNF 2007-04-18 09:11:38: Bad TC Reported
Message-ID: <mailman.401.1357938807.25926.tylan1-pcs@snf.stanford.edu>

replaced t/c connedtion blocks. T/c readings 
are good.



From seymour at snf.stanford.edu  Wed Apr 25 11:26:07 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 25 Apr 2007 11:26:07 -0700
Subject: Problem tylan1 SNF 2007-04-17 16:50:05: bad T/C TEMPS
Message-ID: <mailman.402.1357938807.25926.tylan1-pcs@snf.stanford.edu>

T/c connection blocks replaced.



From closega at snf.stanford.edu  Fri Apr 27 19:51:56 2007
From: closega at snf.stanford.edu (closega at snf.stanford.edu)
Date: Fri, 27 Apr 2007 19:51:56 -0700
Subject: Problem tylan1 SNF 2007-04-27 19:51:56: use at your own risk
Message-ID: <mailman.403.1357938807.25926.tylan1-pcs@snf.stanford.edu>

The tube controller was beeping when I used it. I don't know why. I proceeded anyway, but the measured deposited oxide was way way off compared to the expected value (10nm vs 40mn eexpected). I was using the ee410 GATEOX recipe.
-Gael
 



From seymour at snf.stanford.edu  Mon Apr 30 08:23:31 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 30 Apr 2007 08:23:31 -0700
Subject: Shutdown tylan1 SNF 2007-04-30 08:23:30: N2 flow shows minus 10 liters
Message-ID: <mailman.404.1357938807.25926.tylan1-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Mon Apr 30 09:56:05 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 30 Apr 2007 09:56:05 -0700
Subject: Problem tylan1 SNF 2007-04-27 19:51:56: use at your own risk
Message-ID: <mailman.405.1357938807.25926.tylan1-pcs@snf.stanford.edu>

N2 fault has been fixed.



From seymour at snf.stanford.edu  Mon Apr 30 09:57:28 2007
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mon, 30 Apr 2007 09:57:28 -0700
Subject: Shutdown tylan1 SNF 2007-04-30 08:23:30: N2 flow shows minus 10 liters
Message-ID: <mailman.406.1357938807.25926.tylan1-pcs@snf.stanford.edu>

removed and checked sensor for N2. It was ok. Readjusted all gas zeros. did auto zero routine. Cjhecked N2 flow and it is working as it should.