Problem tylan1 SNF 2007-04-27 19:51:56: use at your own risk

closega at closega at
Fri Apr 27 19:51:56 PDT 2007

The tube controller was beeping when I used it. I don't know why. I proceeded anyway, but the measured deposited oxide was way way off compared to the expected value (10nm vs 40mn eexpected). I was using the ee410 GATEOX recipe.

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