Problem tylan1 SNF 2007-04-27 19:51:56: use at your own risk

closega at snf.stanford.edu closega at snf.stanford.edu
Fri Apr 27 19:51:56 PDT 2007


The tube controller was beeping when I used it. I don't know why. I proceeded anyway, but the measured deposited oxide was way way off compared to the expected value (10nm vs 40mn eexpected). I was using the ee410 GATEOX recipe.
-Gael
 




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