Problem tylan1 SNF 2007-08-23 16:20:25: non uniform deposition

renshen at snf.stanford.edu renshen at snf.stanford.edu
Thu Aug 23 16:20:28 PDT 2007


I am using dry oxidation at 850deg, with 5 wafers sitting in the first boad. the resulting average thickness is 177A with a deviation of 7A. 




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