Problem tylan1 SNF 2007-08-29 15:25:11: Within-a-wafer uniformity is 6% for wet ox
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Aug 29 15:25:11 PDT 2007
Labmembers should be aware that the uniformity is not at it's best. We would like to see 1% or lower.
Problem being looked into further.
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