Problem tylan1 SNF 2007-08-29 15:25:11: Within-a-wafer uniformity is 6% for wet ox

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Aug 29 15:25:11 PDT 2007


Labmembers should be aware that the uniformity is not at it's best.  We would like to see 1% or lower.
Problem being looked into further.




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