Comment tylan1 SNF 2007-08-29 15:29:52: Set Process Quals, pt. 2

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Aug 29 15:29:52 PDT 2007


WET900  oo:39:00  50 wafer spread
Average all wafers = 886A
Within-a-wafer = 6.0%
Wafer-to-wafer = 3.5%
The average has decreased from 958A yesterday.
At 6% within-a-wafer we are officially out of spec.
Torch changed, door checked- what next?




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